Pyrolytic boron nitride (PBN) plate is a high-performance material prepared by advanced chemical vapor deposition technology. It is carefully synthesized by chemical vapor deposition (CVD) process through chemical reaction of ammonia and boron halide under the specific environment of high temperature and high vacuum. This material can not only be presented in the form of thin plates, but also can be directly made into various final products such as tubes, rings or thin-walled containers, showing extremely high application flexibility.
This boron nitride prepared by high-temperature pyrolysis reaction has high purity, high thermal conductivity, high mechanical strength, good electrical insulation and non-toxicity, chemical inertness, and excellent structure and performance. It is an ideal container for element purification, compound and compound semiconductor crystal growth. The main application areas are OLED evaporation devices, semiconductor single crystal growth (VGF, LEC) crucibles, molecular beam epitaxy (MBE) evaporation crucibles, MOCVD heaters, polycrystalline synthesis boats, high-temperature and high-vacuum equipment insulation boards, etc.
The main feature of pyrolytic boron nitride is its very high purity, which can reach more than 99.999% (the purity of hot-pressed boron nitride is usually only about 99%), mainly because no sintering agent is added during its preparation. Therefore, pyrolytic boron nitride has many unique properties, such as excellent chemical and thermal stability, no pores, high density (its density is close to the theoretical density of the material), etc.
Wide range of applications
With the above-mentioned unique properties, pyrolytic boron nitride plates have been widely used in many high-end fields:
1. OLED evaporation device: In the production process of OLED display screens, PBN plates are used as key components of evaporation devices. Its high purity and excellent chemical stability can ensure the uniform evaporation and deposition of organic light-emitting materials, and improve the quality and performance of OLED display screens.
2. Semiconductor single crystal growth crucible: Whether it is a semiconductor single crystal growth process such as vertical gradient solidification (VGF) or liquid-sealed Czochralski (LEC), crucibles made of PBN plates play a vital role. It can provide a pure and stable environment for crystal growth under high temperature environment, which helps to grow high-quality semiconductor single crystals and meet the demand of the electronics industry for high-performance chips.
3. Molecular beam epitaxy evaporation crucible: In molecular beam epitaxy (MBE) technology, PBN plate is used as an evaporation crucible material, which can accurately control the material purity and evaporation rate of the evaporation source, providing strong support for the growth of high-quality epitaxial films and promoting the development of semiconductor optoelectronic devices and other fields.
4. MOCVD heater: Metal organic chemical vapor deposition (MOCVD) is one of the important processes in modern semiconductor manufacturing, and PBN plate has been widely used in the heater of this process. Its high thermal conductivity and high temperature resistance can ensure the efficient and stable operation of the heater, provide suitable temperature conditions for chemical reactions in the MOCVD process, and promote the growth of high-quality semiconductor films.
5. Polycrystalline synthesis boat: In the synthesis process of polycrystalline materials, the boat made of PBN board can withstand high temperature and chemical corrosion, ensuring the pure and stable growth environment of polycrystalline materials, which helps to obtain high-quality polycrystalline products and meet the needs of multiple fields such as electronics and optics for polycrystalline materials.
6. High-temperature and high-vacuum equipment insulation board: Due to the high density, high purity and good thermal insulation performance of PBN board, it is often used as an insulation board for high-temperature and high-vacuum equipment. Under such extreme working conditions, PBN plates can effectively reduce heat transfer, protect the internal structure and components of the equipment from high temperature, extend the service life of the equipment, and improve the overall performance and reliability of the equipment.
In summary, pyrolytic boron nitride plates have shown irreplaceable advantages in many high-end fields with their excellent properties such as high purity, high thermal conductivity, high mechanical strength, good electrical insulation, non-toxicity and chemical inertness. Although their prices are relatively high, in the long run, the value they bring in improving product quality, reducing production costs, and ensuring stable operation of equipment far exceeds the cost of investment, so they have broad development prospects and application.